Invention Grant
- Patent Title: Method for creating a resonator
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Application No.: US14367803Application Date: 2012-12-20
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Publication No.: US09755612B2Publication Date: 2017-09-05
- Inventor: Thierry Hessler , Silvio Dalla Piazza
- Applicant: The Swatch Group Research and Development Ltd
- Applicant Address: CH Marin
- Assignee: The Swatch Group Research and Development Ltd
- Current Assignee: The Swatch Group Research and Development Ltd
- Current Assignee Address: CH Marin
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: EP11195420 20111222
- International Application: PCT/EP2012/076498 WO 20121220
- International Announcement: WO2013/092920 WO 20130627
- Main IPC: B44C1/22
- IPC: B44C1/22 ; H03H9/19 ; B81C1/00 ; G04C3/12 ; G04F5/06 ; G04G17/02 ; G04B17/06 ; G04B17/34 ; B23K26/00 ; F21V17/02 ; H01L41/047 ; H01L41/332 ; H03H9/215
Abstract:
A method for manufacturing a resonator in a substrate, including: a) modifying a structure of at least one region of the substrate to make the at least one region more selective; b) etching the at least one region to selectively manufacture the resonator.
Public/Granted literature
- US20150036346A1 METHOD FOR CREATING A RESONATOR Public/Granted day:2015-02-05
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