Invention Grant
- Patent Title: Electroplating apparatus with notch adapted contact ring seal and thief electrode
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Application No.: US14606775Application Date: 2015-01-27
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Publication No.: US09758897B2Publication Date: 2017-09-12
- Inventor: Gregory J. Wilson , Paul R. McHugh
- Applicant: APPLIED Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Perkins Coie LLP
- Agent Kenneth H. Ohriner
- Main IPC: C25D7/12
- IPC: C25D7/12 ; C25D17/06 ; C25D21/12 ; C25D17/00

Abstract:
An electro-processing apparatus has a contact ring including a seal which is able to compensate for electric field distortions created by a notch (or other irregularity) on the wafer or work piece. The shape of the contact ring at the notch is changed, to reduce current crowding at the notch. The change in shape changes the resistance of the current path between a thief electrode and the wafer edge to increase thief electrode current drawn from the region of the notch. As a result, the wafer is plated with a film having more uniform thickness.
Public/Granted literature
- US20160215409A1 ELECTROPLATING APPARATUS WITH NOTCH ADAPTED CONTACT RING SEAL AND THIEF ELECTRODE Public/Granted day:2016-07-28
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