Invention Grant
- Patent Title: Micro electro-mechanical heater
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Application No.: US14948549Application Date: 2015-11-23
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Publication No.: US09759641B2Publication Date: 2017-09-12
- Inventor: Yunje Oh , Syed Amanulla Syed Asif , Edward Cyrankowski , Oden Lee Warren
- Applicant: Hysitron, Inc.
- Applicant Address: US MN Eden Prairie
- Assignee: Hysitron, Inc.
- Current Assignee: Hysitron, Inc.
- Current Assignee Address: US MN Eden Prairie
- Agency: Schwegman Lundberg & Woessner, P.A.
- Main IPC: H05B3/20
- IPC: H05B3/20 ; H05B3/10 ; G01N1/42 ; H01J37/20 ; G01N3/08 ; H05B1/02 ; H05B3/22 ; G01N3/18 ; G01N3/42

Abstract:
A sub-micron scale property testing apparatus including a test subject holder and heating assembly. The assembly includes a holder base configured to couple with a sub-micron mechanical testing instrument and electro-mechanical transducer assembly. The assembly further includes a test subject stage coupled with the holder base. The test subject stage is thermally isolated from the holder base. The test subject stage includes a stage subject surface configured to receive a test subject, and a stage plate bracing the stage subject surface. The stage plate is under the stage subject surface. The test subject stage further includes a heating element adjacent to the stage subject surface, the heating element is configured to generate heat at the stage subject surface.
Public/Granted literature
- US20160123859A1 MICRO ELECTRO-MECHANICAL HEATER Public/Granted day:2016-05-05
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