Invention Grant
- Patent Title: MEMS vibrating-beam accelerometer with piezoelectric drive
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Application No.: US13019913Application Date: 2011-02-02
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Publication No.: US09759739B2Publication Date: 2017-09-12
- Inventor: John Strehlow , Doug MacGugan
- Applicant: John Strehlow , Doug MacGugan
- Applicant Address: US NJ Morris Plains
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morris Plains
- Agency: Shumaker & Sieffert, P.A.
- Main IPC: G01C19/00
- IPC: G01C19/00 ; G01P15/097 ; G01L1/16 ; H03H9/24 ; H03H9/02

Abstract:
A high-temperature drive component for a double-ended tuning fork (DETF). The drive component attaches to a surface of at least one of the tines. The drive component includes at least one piezoelectric trace sandwiched at least partially between two electrical traces. At least one of the tines includes a doped silicon base with drive component located thereon. One of the electrical traces is electrically connected to the doped silicon base and the other is electrically isolated from the doped silicon base.
Public/Granted literature
- US20120192649A1 MEMS VIBRATING-BEAM ACCELEROMETER WITH PIEZOELECTRIC DRIVE Public/Granted day:2012-08-02
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