Invention Grant
- Patent Title: Method for manufacturing array substrate, array substrate and display device
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Application No.: US15106052Application Date: 2016-01-14
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Publication No.: US09761617B2Publication Date: 2017-09-12
- Inventor: Zheng Liu , Tsung Chieh Kuo , Xi Chen , Xiaoxiang Zhang , Zhichao Zhang , Mingxuan Liu
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.
- Applicant Address: CN Beijing CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Beijing CN Beijing
- Agency: Nath, Goldberg & Meyer
- Agent Joshua B. Goldberg
- Priority: CN201510424976 20150717
- International Application: PCT/CN2016/070855 WO 20160114
- International Announcement: WO2017/012306 WO 20170126
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/84 ; G02F1/1343 ; H01L27/12 ; H01L29/66 ; G02F1/1368 ; G02F1/1333

Abstract:
A method for manufacturing an array substrate comprises: forming a pixel electrode and a gate of a thin film transistor on a substrate; forming a gate insulating layer; forming an active layer and a source and a drain, which are provided on the active layer, of the thin film transistor by a patterning process; forming a passivation layer; forming a main via penetrating through the gate insulating layer and the passivation layer and a main-via extension portion under a portion of the drain by a patterning process, wherein the main via is connected to the main-via extension portion; removing a portion of the drain which protrudes above the main-via extension portion so as to form a final via; and forming a connection electrode and a common electrode, wherein the connection electrode electrically connects the drain to the pixel electrode through the final via.
Public/Granted literature
- US09721979B1 Method for manufacturing array substrate, array substrate and display device Public/Granted day:2017-08-01
Information query
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