Invention Grant
- Patent Title: Methods of forming structures
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Application No.: US15193328Application Date: 2016-06-27
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Publication No.: US09761797B2Publication Date: 2017-09-12
- Inventor: Hyun Sik Kim , Irina V. Vasilyeva , Kyle B. Campbell , Kyuchul Chong
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24 ; H01L21/56 ; H01L21/02 ; H01L23/31 ; H01L25/065

Abstract:
Some embodiments include methods of forming structures. Spaced-apart features are formed which contain temperature-sensitive material. Liners are formed along sidewalls of the features under conditions which do not expose the temperature-sensitive material to a temperature exceeding 300° C. The liners extend along the temperature-sensitive material and narrow gaps between the spaced-apart features. The narrowed gaps are filled with flowable material which is cured under conditions that do not expose the temperature-sensitive material to a temperature exceeding 300° C. In some embodiments, the features contain memory cell regions over select device regions. The memory cell regions include first chalcogenide and the select device regions include second chalcogenide. The liners extend along and directly against the first and second chalcogenides.
Public/Granted literature
- US20160308126A1 Methods of Forming Structures Public/Granted day:2016-10-20
Information query
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