- 专利标题: Electronic device, electronic apparatus, and moving object
-
申请号: US14688310申请日: 2015-04-16
-
公开(公告)号: US09764940B2公开(公告)日: 2017-09-19
- 发明人: Satoru Tanaka
- 申请人: Seiko Epson Corporation
- 申请人地址: JP
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: JP2014-086545 20140418
- 主分类号: G01P15/125
- IPC分类号: G01P15/125 ; B81B3/00 ; G01P15/08
摘要:
An electronic device includes a first functional element including a first movable element capable of moving in a first axis direction, and a first dummy electrode; a second functional element including a second movable element capable of moving in a second axis direction intersecting with the first axis direction, and a second dummy electrode; and a first wiring interconnecting the first dummy electrode and the second dummy electrode.
公开/授权文献
信息查询
IPC分类: