Invention Grant
- Patent Title: Semiconductor integrated device for acoustic applications with contamination protection element, and manufacturing method thereof
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Application No.: US14943848Application Date: 2015-11-17
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Publication No.: US09769554B2Publication Date: 2017-09-19
- Inventor: Roberto Brioschi , Silvia Adorno , Kenneth Fonk
- Applicant: STMICROELECTRONICS S.R.L. , STMICROELECTRONICS (MALTA) LTD
- Applicant Address: MT Kirkop IT Agrate Brianza
- Assignee: STMICROELECTRONICS (MALTA) LTD,STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS (MALTA) LTD,STMICROELECTRONICS S.R.L.
- Current Assignee Address: MT Kirkop IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group LLP
- Priority: ITTO2015A0148 20150305
- Main IPC: H04R1/08
- IPC: H04R1/08 ; H04R19/00 ; H04R19/04 ; H04R31/00 ; B81B7/00 ; B81C1/00

Abstract:
A semiconductor integrated device, comprising: a package defining an internal space and having an acoustic-access opening in acoustic communication with an environment external to the package; a MEMS acoustic transducer, housed in the internal space and provided with an acoustic chamber facing the acoustic-access opening; and a filtering module, which is designed to inhibit passage of contaminating particles having dimensions larger than a filtering dimension and is set between the MEMS acoustic transducer and the acoustic-access opening. The filtering module defines at least one direct acoustic path between the acoustic-access opening and the acoustic chamber.
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