SEMICONDUCTOR INTEGRATED DEVICE ASSEMBLY PROCESS
    7.
    发明申请
    SEMICONDUCTOR INTEGRATED DEVICE ASSEMBLY PROCESS 有权
    半导体集成器件组装工艺

    公开(公告)号:US20130214368A1

    公开(公告)日:2013-08-22

    申请号:US13772210

    申请日:2013-02-20

    Abstract: A process for assembly of an integrated device, envisages: providing a first body of semiconductor material integrating at least one electronic circuit and having a top surface; providing a second body of semiconductor material integrating at least one microelectromechanical structure and having a bottom surface; and stacking the second body on the first body with the interposition, between the top surface of the first body and the bottom surface of the second body, of an elastic spacer material. Prior to the stacking step, the step is envisaged of providing, in an integrated manner, at the top surface of the first body a confinement and spacing structure that confines inside it the elastic spacer material and supports the second body at a distance from the first body during the stacking step.

    Abstract translation: 集成装置的组装方法设想:提供集成至少一个电子电路并具有顶表面的第一半导体材料体; 提供集成至少一个微机电结构并具有底表面的第二半导体材料; 并且在所述第一主体的顶表面和所述第二主体的所述底表面之间插入所述第一主体上的所述第二主体的弹性间隔件材料。 在层叠步骤之前,该步骤被设想为以第一体积的方式在第一体的顶表面处提供约束和间隔结构,该限制和间隔结构在其内部限定弹性间隔物材料,并且将第二体与第一体 身体在堆叠步骤。

    Semiconductor integrated device assembly process
    8.
    发明授权
    Semiconductor integrated device assembly process 有权
    半导体集成器件组装过程

    公开(公告)号:US08921164B2

    公开(公告)日:2014-12-30

    申请号:US13772210

    申请日:2013-02-20

    Abstract: A process for assembly of an integrated device, envisages: providing a first body of semiconductor material integrating at least one electronic circuit and having a top surface; providing a second body of semiconductor material integrating at least one microelectromechanical structure and having a bottom surface; and stacking the second body on the first body with the interposition, between the top surface of the first body and the bottom surface of the second body, of an elastic spacer material. Prior to the stacking step, the step is envisaged of providing, in an integrated manner, at the top surface of the first body a confinement and spacing structure that confines inside it the elastic spacer material and supports the second body at a distance from the first body during the stacking step.

    Abstract translation: 集成装置的组装方法设想:提供集成至少一个电子电路并具有顶表面的第一半导体材料体; 提供集成至少一个微机电结构并具有底表面的第二半导体材料; 并且在所述第一主体的顶表面和所述第二主体的所述底表面之间插入所述第一主体上的所述第二主体的弹性间隔件材料。 在层叠步骤之前,该步骤被设想为以第一体积的方式在第一体的顶表面处提供约束和间隔结构,该限制和间隔结构在其内部限定弹性间隔物材料,并且将第二体与第一体 身体在堆叠步骤。

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