Invention Grant
- Patent Title: Magnet plate assembly, deposition apparatus including the same, and deposition method using the same
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Application No.: US14752075Application Date: 2015-06-26
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Publication No.: US09773600B2Publication Date: 2017-09-26
- Inventor: Jeongwon Han , Dosun Kim , Masao Nishiguchi , Youngmin Baik
- Applicant: Samsung Display Co., LTD.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2014-0123711 20140917
- Main IPC: H01F7/02
- IPC: H01F7/02 ; C23C14/04 ; H01L51/56

Abstract:
A magnet plate assembly includes: a magnetic body; a magnet support which supports the magnetic body and has a first protrusion; a guide part which supports the magnet support and has a first opening through which the first protrusion passes; a first frame formed extending in a width direction of the magnet support, to accommodate the first protrusion; a first mother block which is disposed adjacent to one end side of the guide part, is contactable with one end of the guide part, and moves the guide part in a length direction; and a second mother block which is disposed adjacent to another end side of the guide part, is contactable with the other end of the guide part, and moves or fixes the guide part, wherein the first protrusion is formed slidable in the width direction on the first frame.
Public/Granted literature
- US20160078988A1 MAGNET PLATE ASSEMBLY, DEPOSITION APPARATUS INCLUDING THE SAME, AND DEPOSITION METHOD USING THE SAME Public/Granted day:2016-03-17
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