Magnet plate assembly, deposition apparatus including the same, and deposition method using the same

    公开(公告)号:US09773600B2

    公开(公告)日:2017-09-26

    申请号:US14752075

    申请日:2015-06-26

    CPC classification number: H01F7/0221 C23C14/042 H01L51/56

    Abstract: A magnet plate assembly includes: a magnetic body; a magnet support which supports the magnetic body and has a first protrusion; a guide part which supports the magnet support and has a first opening through which the first protrusion passes; a first frame formed extending in a width direction of the magnet support, to accommodate the first protrusion; a first mother block which is disposed adjacent to one end side of the guide part, is contactable with one end of the guide part, and moves the guide part in a length direction; and a second mother block which is disposed adjacent to another end side of the guide part, is contactable with the other end of the guide part, and moves or fixes the guide part, wherein the first protrusion is formed slidable in the width direction on the first frame.

    MAGNET PLATE ASSEMBLY, DEPOSITION APPARATUS INCLUDING THE SAME, AND DEPOSITION METHOD USING THE SAME
    2.
    发明申请
    MAGNET PLATE ASSEMBLY, DEPOSITION APPARATUS INCLUDING THE SAME, AND DEPOSITION METHOD USING THE SAME 有权
    磁铁板组件,包括其的沉积装置和使用其的沉积方法

    公开(公告)号:US20160078988A1

    公开(公告)日:2016-03-17

    申请号:US14752075

    申请日:2015-06-26

    CPC classification number: H01F7/0221 C23C14/042 H01L51/56

    Abstract: A magnet plate assembly includes: a magnetic body; a magnet support which supports the magnetic body and has a first protrusion; a guide part which supports the magnet support and has a first opening through which the first protrusion passes; a first frame formed extending in a width direction of the magnet support, to accommodate the first protrusion; a first mother block which is disposed adjacent to one end side of the guide part, is contactable with one end of the guide part, and moves the guide part in a length direction; and a second mother block which is disposed adjacent to another end side of the guide part, is contactable with the other end of the guide part, and moves or fixes the guide part, wherein the first protrusion is formed slidable in the width direction on the first frame.

    Abstract translation: 磁板组件包括:磁体; 支撑磁体并具有第一突起的磁体支架; 引导部,其支撑所述磁体支撑并具有所述第一突起穿过的第一开口; 第一框架,其形成为沿着所述磁体支撑件的宽度方向延伸,以容纳所述第一突出部; 与引导部的一端侧相邻配置的第一母体块能够与引导部的一端接触,并且在长度方向上移动引导部; 以及与所述引导部的另一端侧相邻配置的第二母块,与所述引导部的另一端接触,并且使所述引导部移动或固定,其中,所述第一突起形成为能够在所述宽度方向上滑动 第一帧。

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