Invention Grant
- Patent Title: FinFET semiconductor devices with replacement gate structures
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Application No.: US14962015Application Date: 2015-12-08
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Publication No.: US09773867B2Publication Date: 2017-09-26
- Inventor: Ruilong Xie , Xiuyu Cai , Kangguo Cheng , Ali Khakifirooz
- Applicant: GLOBALFOUNDRIES Inc. , International Business Machines Corporation
- Applicant Address: KY Grand Cayman US NY Armonk
- Assignee: GLOBALFOUNDRIES Inc.,International Business Machines Corporation
- Current Assignee: GLOBALFOUNDRIES Inc.,International Business Machines Corporation
- Current Assignee Address: KY Grand Cayman US NY Armonk
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/762 ; H01L27/088 ; H01L29/66 ; H01L29/78 ; H01L21/8234 ; H01L29/423 ; H01L29/417

Abstract:
A device includes first and second fins defined in a semiconductor substrate and a raised isolation post structure positioned between the first and second fins, wherein an upper surface of the raised isolation post structure is at a level that is approximately equal to or greater than a level corresponding to an upper surface of each of the first and second fins. A first space is defined by a sidewall of the first fin and a first sidewall of the raised isolation post structure, a second space is defined by a sidewall of the second fin and a second sidewall of the raised isolation post structure, and a gate structure is positioned around a portion of each of the first and second fins and around a portion of the raised isolation post structure, wherein at least portions of the gate structure are positioned in the first and second spaces.
Public/Granted literature
- US20160093692A1 FINFET SEMICONDUCTOR DEVICES WITH REPLACEMENT GATE STRUCTURES Public/Granted day:2016-03-31
Information query
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