- 专利标题: Dispensing apparatus and dispensing method
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申请号: US14092533申请日: 2013-11-27
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公开(公告)号: US09776216B2公开(公告)日: 2017-10-03
- 发明人: Weibo Yu , Kuo-Sheng Chuang , Wen-Yu Ku , Chin-Hsiang Lin
- 申请人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 申请人地址: TW Hsinchu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- 当前专利权人地址: TW Hsinchu
- 代理机构: McDermott Will & Emery LLP
- 主分类号: B08B3/02
- IPC分类号: B08B3/02 ; B08B17/02 ; H01L21/67 ; B05B15/02
摘要:
A dispensing method is disclosed that includes the following steps: a cleaning sleeve is provided to surround a spray member. A first fluid is previously dispensed from a first fluid outlet of the spray member. A second fluid is sprayed from a second fluid outlet of the cleaning sleeve to clean the spray member. The cleaning sleeve is opened or slid away from the spray member, such that the first fluid outlet of the spray member is exposed to a substrate. The first fluid is dispensed from the first fluid outlet of the spray member to the substrate.
公开/授权文献
- US20150144161A1 DISPENSING APPARATUS AND DISPENSING METHOD 公开/授权日:2015-05-28
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