Invention Grant
- Patent Title: Dispensing apparatus and dispensing method
-
Application No.: US14092533Application Date: 2013-11-27
-
Publication No.: US09776216B2Publication Date: 2017-10-03
- Inventor: Weibo Yu , Kuo-Sheng Chuang , Wen-Yu Ku , Chin-Hsiang Lin
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McDermott Will & Emery LLP
- Main IPC: B08B3/02
- IPC: B08B3/02 ; B08B17/02 ; H01L21/67 ; B05B15/02

Abstract:
A dispensing method is disclosed that includes the following steps: a cleaning sleeve is provided to surround a spray member. A first fluid is previously dispensed from a first fluid outlet of the spray member. A second fluid is sprayed from a second fluid outlet of the cleaning sleeve to clean the spray member. The cleaning sleeve is opened or slid away from the spray member, such that the first fluid outlet of the spray member is exposed to a substrate. The first fluid is dispensed from the first fluid outlet of the spray member to the substrate.
Public/Granted literature
- US20150144161A1 DISPENSING APPARATUS AND DISPENSING METHOD Public/Granted day:2015-05-28
Information query
IPC分类: