- 专利标题: Method for producing a single-crystalline layer
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申请号: US14415980申请日: 2013-07-15
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公开(公告)号: US09777393B2公开(公告)日: 2017-10-03
- 发明人: Lamine Benaissa
- 申请人: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 申请人地址: FR Paris
- 专利权人: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 当前专利权人: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- 当前专利权人地址: FR Paris
- 代理机构: Oliff PLC
- 优先权: FR1256898 20120717
- 国际申请: PCT/FR2013/051688 WO 20130715
- 国际公布: WO2014/013173 WO 20140123
- 主分类号: C30B13/00
- IPC分类号: C30B13/00 ; H01L21/02 ; C30B13/24
摘要:
Process for fabricating a thin single-crystalline layer n, including steps of: a) providing a support substrate n, b) placing a seed sample n, c) depositing a thin layer n so as to form an initial interface region n including a proportion of seed sample n and a proportion of thin layer n, the proportion of seed sample n decreasing from the first peripheral part n towards the second peripheral part n, e) providing an energy input to the initial interface region n contiguous to the first peripheral part n so as to liquefy a portion n of the thin layer and form a solid/liquid interface region n, and f) gradually moving the energy input away from the seed sample n so as to solidify the portion n so as to gradually move the solid/liquid interface region n.
公开/授权文献
- US20150191847A1 METHOD FOR PRODUCING A SINGLE-CRYSTALLINE LAYER 公开/授权日:2015-07-09
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