Invention Grant
- Patent Title: Method and structure providing a front-end-of-line and a back-end-of-line coupled waveguides
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Application No.: US14467531Application Date: 2014-08-25
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Publication No.: US09778416B2Publication Date: 2017-10-03
- Inventor: Roy Meade , Jason Orcutt , Milos Popovic , Jeffrey Shainline , Zvi Sternberg , Vladimir Stojanovic , Ofer Tehar-Zahav
- Applicant: MICRON TECHNOLOGY, INC. , Massachusetts Institute of Technology
- Applicant Address: US ID Boise US MA Cambridge
- Assignee: Micron Technology, Inc.,Massachusetts Institute of Technology
- Current Assignee: Micron Technology, Inc.,Massachusetts Institute of Technology
- Current Assignee Address: US ID Boise US MA Cambridge
- Agency: Perkins Coie LLP
- Main IPC: G02B6/12
- IPC: G02B6/12 ; G02B6/122 ; G02F1/025
Abstract:
An integrated structure and method of formation provide a lower level waveguide having a core of a first material and a higher level waveguide having a core of a second material and a coupling region for coupling the two waveguides together. The different core materials provided different coupled waveguides having different light loss characteristics.
Public/Granted literature
- US20160054520A1 METHOD AND STRUCTURE PROVIDING A FRONT-END-OF-LINE AND A BACK-END-OF-LINE COUPLED WAVEGUIDES Public/Granted day:2016-02-25
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