Invention Grant
- Patent Title: Methods of forming integrated structures
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Application No.: US14942823Application Date: 2015-11-16
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Publication No.: US09780103B2Publication Date: 2017-10-03
- Inventor: Yongjun Jeff Hu , Allen McTeer
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L27/11524 ; H01L21/02 ; H01L21/322 ; H01L27/1157

Abstract:
Some embodiments include an integrated structure having semiconductor material within a region between two parallel surfaces. The semiconductor material has grain boundaries parallel to the parallel surfaces. At least one circuit component utilizes a region of the semiconductor material in a gated device. The semiconductor material has little if any metal therein so that the gated device has Ion/Ioff characteristics similar to if the semiconductor material had no metal therein. Some embodiments include a method in which semiconductor material is provided between a pair of parallel surfaces, and in which the parallel surfaces and semiconductor material extend between a first end and a second end. Metal is formed adjacent the first end, and gettering material is formed adjacent the second end. Thermal processing induces crystallization of the semiconductor material and drives the metal along the semiconductor material and into the gettering material. The gettering material is then removed.
Public/Granted literature
- US20170141119A1 Integrated Structures and Methods of Forming Integrated Structures Public/Granted day:2017-05-18
Information query
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