Invention Grant
- Patent Title: Method for manufacturing array substrate, array substrate thereof and display device
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Application No.: US14416032Application Date: 2014-05-30
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Publication No.: US09780120B2Publication Date: 2017-10-03
- Inventor: Xiaoxiong Tian , Zhuo Zhang , Wei Deng
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN
- Agency: Brooks Kushman P.C.
- Priority: CN201310727100 20131225
- International Application: PCT/CN2014/078921 WO 20140530
- International Announcement: WO2015/096395 WO 20150702
- Main IPC: H01L27/14
- IPC: H01L27/14 ; H01L21/00 ; H01L21/338 ; H01L27/12

Abstract:
The present disclosure provides a method for manufacturing an array substrate, an array substrate and a display device. The method includes: forming a gate line, a gate electrode and an insulating layer which covers the gate line and the gate electrode on a first surface of a substrate; forming a semiconductive film on the insulating layer; patterning the semiconductive film using the gate electrode and the gate line as a mask, so as to form an source semiconductive layer at a region where the gate line and the gate electrode are located; and manufacturing a target semiconductive layer using the source semiconductive layer.
Public/Granted literature
- US20160141306A1 METHOD FOR MANUFACTURING ARRAY SUBSTRATE, ARRAY SUBSTRATE THEREOR AND DISPLAY DEVICE Public/Granted day:2016-05-19
Information query
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