Invention Grant
- Patent Title: Cathodic arc deposition apparatus and method
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Application No.: US15027643Application Date: 2014-09-25
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Publication No.: US09786474B2Publication Date: 2017-10-10
- Inventor: Thomas Balzano , Russell A. Beers
- Applicant: United Technologies Corporation
- Applicant Address: US CT Farmington
- Assignee: United Technologies Corporation
- Current Assignee: United Technologies Corporation
- Current Assignee Address: US CT Farmington
- Agency: Kinney & Lange, P.A.
- International Application: PCT/US2014/057503 WO 20140925
- International Announcement: WO2015/053956 WO 20150416
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C14/32 ; C23C14/06 ; C23C14/08 ; C23C14/14 ; H01J37/34

Abstract:
A cathodic arc coating apparatus includes a vessel, a cathode disposed in the vessel, and a stinger assembly. The stinger assembly includes a first magnetic field generator disposed in a first stinger cup in selective contact with the cathode. The first stinger cup has at least a first electrically conductive cup portion spaced from a second electrically conductive cup portion by a thermally insulating layer therebetween.
Public/Granted literature
- US20160260583A1 CATHODIC ARC DEPOSITION APPARATUS AND METHOD Public/Granted day:2016-09-08
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