- 专利标题: Vertical memory devices and methods of manufacturing the same
-
申请号: US15217313申请日: 2016-07-22
-
公开(公告)号: US09786676B2公开(公告)日: 2017-10-10
- 发明人: Jang-Gn Yun , Zhiliang Xia , Ahn-Sik Moon , Se-Jun Park , Joon-Sung Lim , Sung-Min Hwang
- 申请人: Jang-Gn Yun , Zhiliang Xia , Ahn-Sik Moon , Se-Jun Park , Joon-Sung Lim , Sung-Min Hwang
- 申请人地址: KR Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Gyeonggi-do
- 代理机构: Harness, Dickey & Pierce, P.L.C.
- 优先权: KR10-2015-0157066 20151110
- 主分类号: H01L27/115
- IPC分类号: H01L27/115 ; H01L27/1157 ; H01L27/11582 ; H01L23/522 ; H01L23/528
摘要:
A vertical memory device includes a channel, a dummy channel, a plurality of gate electrodes, and a support pattern. The channel extends in a first direction perpendicular to an upper surface of a substrate. The dummy channel extends from the upper surface of the substrate in the first direction. The plurality of gate electrodes are formed at a plurality of levels, respectively, spaced apart from each other in the first direction on the substrate. Each of the gate electrodes surrounds outer sidewalls of the channel and the dummy channel. The support pattern is between the upper surface of the substrate and a first gate electrode among the gate electrodes. The first gate electrode is at a lowermost one of the levels. The channel and the dummy channel contact each other between the upper surface of the substrate and the first gate electrode.
公开/授权文献
信息查询
IPC分类: