Invention Grant
- Patent Title: Capacitive microphone with integrated cavity
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Application No.: US15372927Application Date: 2016-12-08
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Publication No.: US09794711B2Publication Date: 2017-10-17
- Inventor: Mark Sheplak , David Patrick Arnold
- Applicant: University of Florida Research Foundation, Incorporated
- Applicant Address: US FL Gainesville
- Assignee: University of Florida Research Foundation, Incorporated
- Current Assignee: University of Florida Research Foundation, Incorporated
- Current Assignee Address: US FL Gainesville
- Agency: Saliwanchik, Lloyd & Eisenschenk
- Main IPC: H04R25/00
- IPC: H04R25/00 ; H04R31/00 ; H05K1/16 ; H04R1/04 ; H04R19/04 ; H05K3/46 ; H05K1/02 ; H05K1/18

Abstract:
A capacitive microphone and method of fabricating the same are provided. One or more holes can be formed in a first printed circuit board (PCB). A diaphragm can be surface micromachined onto an interior surface of the first PCB at a region having the one or more holes. Interface electronics can also be interconnected to the interior surface of the PCB. One or more spacer PCBs can be attached to a second PCB to the first PCB, such that appropriate interconnections between interconnect vias are made. The second PCB and first PCB with spacers in between can be attached so as to create a cavity in which the diaphragm and interface electronics are located.
Public/Granted literature
- US20170094436A1 CAPACITIVE MICROPHONE WITH INTEGRATED CAVITY Public/Granted day:2017-03-30
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