Techniques for use of wafer bonding techniques for sealing of microfluidic chips are provided. In one aspect, a wafer bonding sealing method includes the steps of: forming a first oxide layer coating surfaces of a first wafer, the first wafer having at least one fluidic chip; forming a second oxide layer on a second wafer; and bonding the first wafer to the second wafer via an oxide-to-oxide bond between the first oxide layer and the second oxide layer to form a bonded wafer pair, wherein the second oxide layer seals the at least one fluidic chip on the first wafer. The second wafer can be at least partially removed after performing the bonding, and fluidic ports may be formed in the second oxide layer. A fluidic chip device is also provided.