Invention Grant
- Patent Title: Compensation and calibration of multiple mass MEMS sensor
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Application No.: US14844965Application Date: 2015-09-03
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Publication No.: US09797921B2Publication Date: 2017-10-24
- Inventor: Tehmoor M. Dar , Bruno J. Debeurre , Raimondo P. Sessego
- Applicant: FREESCALE SEMICONDUCTOR, INC.
- Applicant Address: US TX Austin
- Assignee: NXP USA, Inc.
- Current Assignee: NXP USA, Inc.
- Current Assignee Address: US TX Austin
- Agent Charlene R. Jacobsen
- Main IPC: G01P21/00
- IPC: G01P21/00 ; G01P15/125

Abstract:
A system includes a MEMS sensor having dual proof masses capable of moving independently from one another in response to forces imposed upon the proof masses. Each proof mass includes an independent set of sense contacts configured to provide output signals corresponding to the physical displacement of the corresponding sense mass. A switch system is in communication with the sense contacts. The switch system is configured to enable a sense mode and various test modes for the MEMS sensor. When the switch system enables a sense mode, output signals from the sense contacts can be combined to produce sense signals. When the switch system enables a test mode, the second contacts are electrically decoupled from one another to disassociate the output signals from one another. The independent sense contacts and switch system enable the concurrent compensation and calibration of the proof masses along two different sense axes.
Public/Granted literature
- US20170067932A1 COMPENSATION AND CALIBRATION OF MULTIPLE MASS MEMS SENSOR Public/Granted day:2017-03-09
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