Invention Grant
- Patent Title: Method and apparatus for compensating at least one defect of an optical system
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Application No.: US14457712Application Date: 2014-08-12
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Publication No.: US09798249B2Publication Date: 2017-10-24
- Inventor: Vladimir Dmitriev , Ingo Saenger , Frank Schlesener , Markus Mengel , Johannes Ruoff
- Applicant: Carl Zeiss SMS Ltd. , Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen IL Karmiel
- Assignee: Carl Zeiss SMT GmbH,Carl Zeiss SMS Ltd.
- Current Assignee: Carl Zeiss SMT GmbH,Carl Zeiss SMS Ltd.
- Current Assignee Address: DE Oberkochen IL Karmiel
- Agency: Fish & Richardson P.C.
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03F7/20 ; G02B27/00 ; G02B5/30 ; G01M11/02
Abstract:
The invention relates to a method for compensating at least one defect of an optical system which includes introducing an arrangement of local persistent modifications in at least one optical element of the optical system, which does not have pattern elements on one of its optical surfaces, so that the at least one defect is at least partially compensated.
Public/Granted literature
- US20140347646A1 METHOD AND APPARATUS FOR COMPENSATING AT LEAST ONE DEFECT OF AN OPTICAL SYSTEM Public/Granted day:2014-11-27
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