- 专利标题: MEMS variable capacitor and method for driving the same
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申请号: US13698893申请日: 2011-05-27
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公开(公告)号: US09805874B2公开(公告)日: 2017-10-31
- 发明人: Chang Wook Kim , Dong Chan Park , Ju Young Song , Sang Hun Lee , Sung Bae Cho , Hyun Ho Yang , Jun Bo Yoon , Dong Hoon Choi , Chang Hoon Han
- 申请人: Chang Wook Kim , Dong Chan Park , Ju Young Song , Sang Hun Lee , Sung Bae Cho , Hyun Ho Yang , Jun Bo Yoon , Dong Hoon Choi , Chang Hoon Han
- 申请人地址: KR Seoul KR Daejeon
- 专利权人: LG INNOTEK CO., LTD.,KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
- 当前专利权人: LG INNOTEK CO., LTD.,KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
- 当前专利权人地址: KR Seoul KR Daejeon
- 代理机构: Saliwanchik, Lloyd & Eisenschenk
- 优先权: KR10-2010-0050592 20100528
- 国际申请: PCT/KR2011/003921 WO 20110527
- 国际公布: WO2011/149311 WO 20111201
- 主分类号: H01G5/013
- IPC分类号: H01G5/013 ; H01G7/00 ; H01H7/06 ; H04R25/00 ; G01R27/26 ; H01G5/16
摘要:
Disclosed herein is an MEMS variable capacitor and its driving method, the MEMS variable capacitor including, a first electrode, a second electrode floating over the first electrode upper part, a fixed electrode separated at the second electrode side surface, and a drifting electrode placed between the second electrode and the fixed electrode, connected to the second electrode, and physically contacting the fixed electrode by a voltage applied to the fixed electrode.
公开/授权文献
- US20130063857A1 MEMS VARIABLE CAPACITOR AND METHOD FOR DRIVING THE SAME 公开/授权日:2013-03-14