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    Variable capacitor with linear impedance and high voltage breakdown
    1.
    发明授权
    Variable capacitor with linear impedance and high voltage breakdown 有权

    公开(公告)号：US12040139B2

    公开(公告)日：2024-07-16

    申请号：US17739745

    申请日：2022-05-09

    Applicant: COMET TECHNOLOGIES USA, INC.

    Inventor： Anthony Oliveti ,  Tigran Poghosyan ,  Gary Russell

    IPC: H01G5/14 ,  H01G5/00 ,  H01G5/013 ,  H01G5/18

    CPC classification number: H01G5/14 ,  H01G5/0132 ,  H01G5/18 ,  H01G2005/02

    Abstract: A variable capacitor includes an enclosure having first and second conductive collars separated by an intermediate electrically insulating element. A movable capacitor plate assembly is electrically coupled to the first conductive collar, and a fixed capacitor plate assembly is electrically coupled to the second conductive collar. An actuator extends into the enclosure for advancing and retracting the movable capacitor plate assembly relative to the fixed capacitor plate assembly. A hermetically sealed volume within the enclosure maintains a vacuum or a liquid serving as a dielectric between a capacitor plate of the movable capacitor plate assembly and a capacitor plate of the fixed capacitor plate assembly. At least one capacitor plate comprises a coiled cylindrical plate having a having a greater height at a center portion of the capacitor plate coil and a lower height at an outer portion of the capacitor plate coil.

    Vacuum capacitor
    2.
    发明授权
    Vacuum capacitor 有权

    公开(公告)号：US11488785B2

    公开(公告)日：2022-11-01

    申请号：US17420523

    申请日：2021-02-16

    Applicant: COMET AG

    Inventor： Walter Bigler

    IPC: H01G5/013 ,  H01G5/014 ,  H01G5/011 ,  H01G5/00

    Abstract: The present invention relates to a vacuum capacitor (1, 30) comprising an enclosure (9) to contain a vacuum dielectric medium, a first electrode (12) and a second electrode (13) separated by said vacuum dielectric medium, the enclosure (9) comprising a first conductive collar (2) in electrical contact with the first electrode (12) and a second conductive collar (3) in electrical contact with the second electrode (13), the first conductive collar (2) and the second conductive collar (3) being separated by an insulating element (4) of the enclosure (9), wherein the enclosure (9) exhibits at least one protruding edge (6), said protruding edge (6) being in electrical contact with the closest of the first conductive collar (2) or the second conductive collar (3), wherein the vacuum capacitor (1, 30) comprises at least one protection means (7, 37) covering on the outside of the vacuum enclosure the protruding edge (6), wherein the protection means (7, 37) is made at least partially of an elastomer, wherein at least the outer surface (7b, 37b) of the protection means (7, 37) is electrically conductive and is at the same electrical potential as the closest conductive collar to the protruding edge (6), and wherein the outer surface (7b, 37b) of the protection means (7, 37) has a radius of curvature greater than the radius of curvature of the protruding edge (6).

    CAPACITIVE ELEMENT AND PLASMA PROCESSING DEVICE
    5.
    发明申请
    CAPACITIVE ELEMENT AND PLASMA PROCESSING DEVICE 有权

    公开(公告)号：US20210050156A1

    公开(公告)日：2021-02-18

    申请号：US16964603

    申请日：2019-01-25

    Applicant: NISSIN ELECTRIC CO., LTD.

    Inventor： Dongwei LI ,  Yasunori ANDO

    IPC: H01G5/013 ,  H01J37/32 ,  H01G5/12

    Abstract: A capacitive element using a liquid as a dielectric, whereby the capacitance is prevented from changing. The capacitive element is equipped with: a storage container that has an inlet port for introducing a liquid serving as a dielectric, has an outlet port for discharging the liquid, and is filled with the liquid; and at least one pair of electrodes that are provided in the storage container and face each other, wherein an opening section for exhausting air bubbles in the storage container is formed in an upper wall of the storage container.

    VARIABLE CAPACITOR
    6.
    发明申请
    VARIABLE CAPACITOR 审中-公开

    公开(公告)号：US20200303128A1

    公开(公告)日：2020-09-24

    申请号：US16361214

    申请日：2019-03-22

    Applicant: Yingchao WU ,  Song CHEN ,  Hang LUO

    Inventor： Yingchao WU ,  Song CHEN ,  Hang LUO

    IPC: H01G5/04 ,  H01G5/38 ,  H01G5/16 ,  H01G4/12 ,  H01G5/011 ,  H01G5/013

    Abstract: A variable capacitor is disclosed. The variable capacitor includes a multi-layer ceramic capacitor member, and a capacitance varying mechanism. The multi-layer ceramic capacitor member includes one or two external electrode(s), a ceramic dielectric, and a plurality of electrode layers positioned inside the ceramic dielectric. The capacitance varying mechanism includes an electrical conductor positioned aside and approximate to the ceramic dielectric. The electrical conductor is deformable responsive to a pressure applied thereon, and an area of the electrical conductor in contact with the ceramic dielectric varies in accordance with the pressure, thus varying a capacitance value between the external electrode(s) and the electrical conductor. In general, the external electrode(s) of the multi-layer ceramic capacitor member serve(s) as fixed electrode(s) of the variable capacitor.

    PLASMA PROCESSING APPARATUS
    7.
    发明申请
    PLASMA PROCESSING APPARATUS 审中-公开

    公开(公告)号：US20200219701A1

    公开(公告)日：2020-07-09

    申请号：US16737335

    申请日：2020-01-08

    Applicant: TOKYO ELECTRON LIMITED

    Inventor： Chishio KOSHIMIZU

    IPC: H01J37/32 ,  H01G5/013

    Abstract: An apparatus for plasma processing includes a chamber, a substrate support having a lower electrode and an electrostatic chuck disposed on the lower electrode and configured to support a substrate mounted on the electrostatic chuck in the chamber, and a radio frequency power supply configured to supply a radio frequency power to generate plasma in the chamber. Further, in the apparatus, a bias power supply supplies a bias power. A first electrical path electrically connects the bias power supply and the lower electrode, and a second electrical path that is different from the first electrical path and the lower electrode is configured to supply the bias power from the lower electrode or the first electrical path to an edge ring disposed to surround an edge of the substrate. Further, an impedance adjuster provides a variable impedance to the second electrical path.

    VARIABLE VACUUM CAPACITOR AND COOLING METHOD
    8.
    发明申请
    VARIABLE VACUUM CAPACITOR AND COOLING METHOD 审中-公开

    公开(公告)号：US20200058441A1

    公开(公告)日：2020-02-20

    申请号：US16605288

    申请日：2018-04-13

    Applicant: COMET AG

    Inventor： Thierry Altenhoven ,  Walter Bigler ,  Timothy Albert Weber ,  Mark Mildner

    IPC: H01G2/08 ,  H01G5/017 ,  H01G5/14 ,  H01G5/013

    Abstract: A variable vacuum capacitor is described in which oil inside the main bellows (21) is pumped through the bellows and through the oil circuit (8) of a heat exchanger by a pump (15). Water passes through coolant channels (6) of the heat exchanger, from inlet (7) to outlet (7′). The extendable capacitor drive shaft (14) is hollow and serves as a conduit, conveying the oil to the bottom of the (bellows 21), thereby ensuring a full circulation of the oil right through the bellows and then through the heat exchanger. Pump drive means (9) may be a gerotor hydraulic motor, coupled to a gerotor oil pump (15) via magnetic coupling (22). Pumping heat transfer fluid (oil) through the bellows allows the capacitor to operate at significantly higher currents and/or lower temperatures, and significantly extends the life of the device.

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