- 专利标题: Roller pressing device, imprinting device, and roller pressing method
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申请号: US14400824申请日: 2013-06-19
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公开(公告)号: US09808985B2公开(公告)日: 2017-11-07
- 发明人: Hirosuke Kawaguchi , Yutaka Taniguchi , Satoru Tanaka
- 申请人: SCIVAX CORPORATION
- 申请人地址: JP Kanagawa
- 专利权人: SCIVAX CORPORATION
- 当前专利权人: SCIVAX CORPORATION
- 当前专利权人地址: JP Kanagawa
- 优先权: JP2012-140236 20120621
- 国际申请: PCT/JP2013/066836 WO 20130619
- 国际公布: WO2013/191206 WO 20131227
- 主分类号: B29C59/04
- IPC分类号: B29C59/04 ; B29C35/08 ; G03F7/00 ; B29C59/02 ; B29L7/00
摘要:
A roller-type depressing device, an imprint device and an imprint method utilizing the same which can depress an object like a die or a molding target by controlling the depressing force of a roller is provided. A roller-type depressing device to depress the object with a roller includes a pressure adjusting plate provided with the roller, a roller moving unit moving the roller relative to the object, a pressure adjusting unit holding the pressure adjusting plate in such a way that force produced by a pressure difference in fluid applied to both faces of the pressure adjusting plate acts on the roller, a pressure receiving stage receiving the pressure of the roller via the object, and a pressure adjuster adjusting the pressure difference in fluid applied to both faces of the pressure adjusting plate.
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