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公开(公告)号：US09606431B2
公开(公告)日：2017-03-28
申请号：US14359647
申请日：2012-11-21
申请人： SCIVAX CORPORATION
发明人： Hirosuke Kawaguchi , Satoru Tanaka
CPC分类号： G03F7/0002 , B29C59/02 , B29C59/022 , B29C2059/023 , B29C2791/006 , H01L21/565
摘要： An imprinting device to transfer the mold pattern on a die to a molding target includes a casing forming a pressure-adjusting chamber, a stage supporting the die and the molding target, a frame encircling a circumference of the stage, first moving means moving the casing and the stage in a direction coming close to each other or becoming distant from each other, second moving means moving the casing and the frame in a direction coming close to each other or becoming distant from each other, pressure-adjusting means that adjusts the pressure of a fluid in the pressure-adjusting chamber, and decompression means which decompresses a decompression chamber formed by the stage, a frame, and the die or the molding target, and which eliminates a fluid present between the die and the molding target.
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公开(公告)号：US10357903B2
公开(公告)日：2019-07-23
申请号：US14402402
申请日：2013-12-06
申请人： SCIVAX CORPORATION
摘要： A roller-type depressing device that can depress an object like a die or a molding target by controlling the pressure of a roller, an imprint device, and a method utilizing the same are provided. A roller-type depressing device depresses an object like a die or a molding target by a main roller, and includes a pressure adjusting plate, a roller moving unit that moves the main roller relative to the object, a pressure adjusting unit that holds the pressure adjusting plate so that force produced by a pressure difference in fluid applied to both faces of the pressure adjusting plate acts on the main roller, a pressure receiving stage receiving pressure of the main roller, a pressure adjuster that adjusts the pressure difference in fluid applied to both faces of the pressure adjusting plate, and a pressure equalizer that equalizes pressure applied to the object by the main roller.
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公开(公告)号：US09808985B2
公开(公告)日：2017-11-07
申请号：US14400824
申请日：2013-06-19
申请人： SCIVAX CORPORATION
CPC分类号： B29C59/04 , B29C35/0805 , B29C2059/023 , B29L2007/001 , G03F7/0002
摘要： A roller-type depressing device, an imprint device and an imprint method utilizing the same which can depress an object like a die or a molding target by controlling the depressing force of a roller is provided. A roller-type depressing device to depress the object with a roller includes a pressure adjusting plate provided with the roller, a roller moving unit moving the roller relative to the object, a pressure adjusting unit holding the pressure adjusting plate in such a way that force produced by a pressure difference in fluid applied to both faces of the pressure adjusting plate acts on the roller, a pressure receiving stage receiving the pressure of the roller via the object, and a pressure adjuster adjusting the pressure difference in fluid applied to both faces of the pressure adjusting plate.
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公开(公告)号：US10343312B2
公开(公告)日：2019-07-09
申请号：US14407510
申请日：2013-08-23
申请人： SCIVAX CORPORATION
IPC分类号： B29C59/02 , B29C43/10 , B29D11/00 , B29C43/12 , B82Y40/00 , G03F7/00 , B29C43/36 , B29C43/02 , B29C43/32 , B29C51/28
摘要： An imprint device and an imprint method which form mold patterns on both surfaces of a molding target. An imprint device transfers mold patterns on both surfaces of a molding target using flexible first and second dies and includes first and second casings which each apply pressure of first and second pressurizing rooms respectively, to the first and second dies respectively and the molding target, a pressurizer that adjusts the pressures of the pressurizing rooms, first and second moving units that move the first and second dies respectively and the molding target in a direction coming close to or distant from each other, a depressurizer that depressurizes a depressurizing room formed between the first and second casings, and eliminates fluids present between the dies and the molding target, and a pressure adjuster that adjusts pressures to reduce pressure differences between the depressurizing room and the pressurizing rooms.
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公开(公告)号：US20150091220A1
公开(公告)日：2015-04-02
申请号：US14371849
申请日：2013-01-11
申请人： SCIVAX CORPORATION
CPC分类号： B29C51/10 , B29C51/06 , B29C51/262 , B29C51/303 , B29C51/421 , B29C51/425 , B29C51/46 , B29C2791/007 , B29K2101/12 , B29K2105/256 , B29L2031/756 , B29L2031/7739
摘要： A shaping method and a shaping device are provided which can easily and inexpensively form a curved face in a film including a micropattern. A shaping method is for forming, in a predetermined shaping-target area of a film including a patterned face with a micropattern, and a rear face opposite to the patterned face, a curved face beyond the thickness of the film, and includes a fixing step for fixing an outer edge of the shaping-target area of the film by fixing means, a first heating step for heating the film 20 by heating means 95, and a pressure adjusting step for producing a predetermined pressure difference between both faces of the film by the pressurizing means in such a way that pressure at a side where the film is fixed in the fixing step becomes small to form a pre-curved face.
摘要翻译： 提供了一种成形方法和成形装置，其可以容易且廉价地在包括微图案的薄膜中形成弯曲面。 一种成形方法是在包含具有微图案的图案面的膜的预定成形对象区域和与图案面相对的后表面上形成超过膜厚度的弯曲面，并且包括固定步骤 用于通过固定装置固定膜的成形对象区域的外边缘，通过加热装置95加热膜20的第一加热步骤和用于通过以下步骤产生膜的两个面之间的预定压力差的压力调节步骤： 加压装置使得在定影步骤中胶片固定的一侧的压力变小，形成预弯曲面。
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公开(公告)号：US10421218B2
公开(公告)日：2019-09-24
申请号：US14891429
申请日：2015-06-03
申请人： SCIVAX CORPORATION
发明人： Hirosuke Kawaguchi , Yutaka Taniguchi , Yukimasa Saito , Masaki Sugiyama , Daisuke Matono , Satoru Tanaka
摘要： A roller-type depressing device, an imprinting device, and a roller-type depressing method which are capable of suppressing an uneven elastic deformation of a main roller, and which are also capable of depressing an object uniformly. A roller-type depressing device depresses an object, and includes a main roller having at least a surface formed of an elastic material, and depressing the object, a roller moving unit moving the main roller relative to the object, a pressure adjusting unit adjusting pressure applied to the object by the main roller, a pressure receiving stage receiving the pressure from the main roller via the object, an intermediate roller having at least a surface formed of a material with a larger elastic modulus than the elastic material, and supporting the main roller, and, a backup roller formed shorter in an axial direction than the main roller and the intermediate roller, and supporting the intermediate roller.
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公开(公告)号：US09751252B2
公开(公告)日：2017-09-05
申请号：US14371849
申请日：2013-01-11
申请人： SCIVAX CORPORATION
IPC分类号： B29C51/10 , B29L31/00 , B29K101/12 , B29K105/00 , B29C51/06 , B29C51/26 , B29C51/42 , B29C51/46
CPC分类号： B29C51/10 , B29C51/06 , B29C51/262 , B29C51/303 , B29C51/421 , B29C51/425 , B29C51/46 , B29C2791/007 , B29K2101/12 , B29K2105/256 , B29L2031/756 , B29L2031/7739
摘要： A shaping method and a shaping device are provided which can easily and inexpensively form a curved face in a film including a micropattern. A shaping method is for forming, in a predetermined shaping-target area of a film including a patterned face with a micropattern, and a rear face opposite to the patterned face, a curved face beyond the thickness of the film, and includes a fixing step for fixing an outer edge of the shaping-target area of the film by fixing means, a first heating step for heating the film 20 by heating means 95, and a pressure adjusting step for producing a predetermined pressure difference between both faces of the film by the pressurizing means in such a way that pressure at a side where the film is fixed in the fixing step becomes small to form a pre-curved face.
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8.发明申请ROLLER-TYPE DEPRESSING DEVICE, IMPRINTING DEVICE, AND ROLLER-TYPE DEPRESSING METHOD 有权滚筒式破碎装置，加压装置和滚筒式破碎方法公开(公告)号：US20170072620A1
公开(公告)日：2017-03-16
申请号：US14891429
申请日：2015-06-03
申请人： SCIVAX CORPORATION
摘要： A roller-type depressing device, an imprinting device, and a roller-type depressing method which are capable of suppressing an uneven elastic deformation of a main roller, and which are also capable of depressing an object uniformly. A roller-type depressing device depresses an object, and includes a main roller having at least a surface formed of an elastic material, and depressing the object, a roller moving unit moving the main roller relative to the object, a pressure adjusting unit adjusting pressure applied to the object by the main roller, a pressure receiving stage receiving the pressure from the main roller via the object, an intermediate roller having at least a surface formed of a material with a larger elastic modulus than the elastic material, and supporting the main roller, and, a backup roller formed shorter in an axial direction than the main roller and the intermediate roller, and supporting the intermediate roller.
摘要翻译： 能够抑制主辊的不均匀的弹性变形并且也能够均匀地压下物体的辊式按压装置，压印装置和辊式按压方法。 滚筒式按压装置按压物体，并且包括至少具有由弹性材料形成的表面并且按压物体的主辊，相对于物体移动主辊的辊移动单元，调节压力 通过主辊施加到物体上，压力接收台通过物体接收来自主辊的压力，中间辊至少具有由弹性材料具有较大弹性模量的材料形成的表面，并且支撑主体 辊，以及在轴向上比主辊和中间辊更短的支撑辊，并支撑中间辊。
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9.发明申请Roller-Type Pressurization Device, Imprinter, and Roller-Type Pressurization Method 审中-公开辊式加压装置，打印机和滚筒式加压方法公开(公告)号：US20150283754A1
公开(公告)日：2015-10-08
申请号：US14402402
申请日：2013-12-06
申请人： SCIVAX CORPORATION
CPC分类号： B29C43/3697 , B29C43/361 , B29C59/02 , B29C59/022 , B29C59/04 , B29C2043/3613 , B29C2059/023 , B29L2007/001
摘要： A roller-type depressing device that can depress an object like a die or a molding target by controlling the pressure of a roller, an imprint device, and a method utilizing the same are provided. A roller-type depressing device depresses an object like a die or a molding target by a main roller, and includes a pressure adjusting plate, a roller moving unit that moves the main roller relative to the object, a pressure adjusting unit that holds the pressure adjusting plate so that force produced by a pressure difference in fluid applied to both faces of the pressure adjusting plate acts on the main roller, a pressure receiving stage receiving pressure of the main roller, a pressure adjuster that adjusts the pressure difference in fluid applied to both faces of the pressure adjusting plate, and a pressure equalizer that equalizes pressure applied to the object by the main roller.
摘要翻译： 提供一种滚筒式按压装置，其可以通过控制辊的压力，压印装置和利用该压模的方法来压下模具或成型目标物体。 滚筒式按压装置通过主辊按压模具或模制品的物体，并且包括压力调节板，使主辊相对于物体移动的滚子移动单元，保持压力的压力调节单元 调节板，使得施加到压力调节板的两个面上的流体的压力差产生的力作用在主辊上，承受主辊压力的压力接收台，调节流体中压力差的压力调节器， 压力调节板的两个面，以及均衡由主辊施加到物体的压力的压力均衡器。
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公开(公告)号：US20150217506A1
公开(公告)日：2015-08-06
申请号：US14400824
申请日：2013-06-19
申请人： SCIVAX CORPORATION
IPC分类号： B29C59/04
CPC分类号： B29C59/04 , B29C35/0805 , B29C2059/023 , B29L2007/001 , G03F7/0002
摘要： A roller-type depressing device, an imprint device and an imprint method utilizing the same which can depress an object like a die or a molding target by controlling the depressing force of a roller is provided. A roller-type depressing device to depress the object with a roller includes a pressure adjusting plate provided with the roller, a roller moving unit moving the roller relative to the object, a pressure adjusting unit holding the pressure adjusting plate in such a way that force produced by a pressure difference in fluid applied to both faces of the pressure adjusting plate acts on the roller, a pressure receiving stage receiving the pressure of the roller via the object, and a pressure adjuster adjusting the pressure difference in fluid applied to both faces of the pressure adjusting plate.
摘要翻译： 提供了一种辊式压下装置，压印装置和使用该压印装置的压印方法，其通过控制辊的压下力来压制像模具或模制对象物体。 用辊压住物体的滚筒式按压装置包括设置有辊的压力调节板，相对于物体移动辊的滚动移动单元，以压力调节板的方式保持压力调节板 由压力调节板的两面施加的流体的压差产生的压力作用在辊上，压力接收台通过物体接收辊的压力，以及压力调节器，调节施加在压力调节板的两个面上的流体的压力差 压力调节板。
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