Invention Grant
- Patent Title: Integrated SMO gas sensor module
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Application No.: US14334572Application Date: 2014-07-17
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Publication No.: US09810653B2Publication Date: 2017-11-07
- Inventor: Ravi Shankar , Olivier Le Neel , Tien-Choy Loh , Shian-Yeu Kam
- Applicant: STMicroelectronics Pte Ltd
- Applicant Address: SG Singapore
- Assignee: STMICROELECTRONICS PTE LTD
- Current Assignee: STMICROELECTRONICS PTE LTD
- Current Assignee Address: SG Singapore
- Agency: Seed IP Law Group LLP
- Main IPC: G01N27/12
- IPC: G01N27/12

Abstract:
Miniature resistive gas detectors incorporate thin films that can selectively identify specific gases when heated to certain characteristic temperatures. A solid state gas sensor module is disclosed that includes a gas sensor, a heater, and a temperature sensor, stacked over an insulating recess. The insulating recess is partially filled with a support material that provides structural integrity. The solid state gas sensor module can be integrated on top of an ASIC on a common substrate. With sufficient thermal insulation, such a gas detector can be provided as a low-power component of mobile electronic devices such as smart phones. A method of operating a multi-sensor array allows detection of relative concentrations of different gas species by either using dedicated sensors, or by thermally tuning the sensors to monitor different gas species.
Public/Granted literature
- US20160018356A1 INTEGRATED SMO GAS SENSOR MODULE Public/Granted day:2016-01-21
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