- 专利标题： Cp2Mg concentration measuring device
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申请号： US15240235申请日： 2016-08-18
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公开(公告)号： US09823181B2公开(公告)日： 2017-11-21
- 发明人: Daisuke Hayashi , Yuhei Sakaguchi , Masakazu Minami , Atsuko Teraoka
- 申请人： HORIBA STEC, CO., LTD.
- 申请人地址： JP Kyoto
- 专利权人： HORIBA STEC, CO., LTD.
- 当前专利权人： HORIBA STEC, CO., LTD.
- 当前专利权人地址： JP Kyoto
- 代理机构： Greenblum & Bernstein, P.L.C.
- 优先权： JP2015-162471 20150820
- 主分类号： G01J5/02
- IPC分类号： G01J5/02 ; G01N21/05 ; G01N21/3504 ; G01N21/03
摘要：
The present invention intends to provide a Cp2Mg concentration measuring device capable of accurately measuring the concentration of Cp2Mg to be supplied to a process chamber without being affected by spontaneous decomposition, and is adapted to measure light intensity in a predetermined wavelength band around 12.8 μm and on the basis of the light intensity, calculate the concentration of Cp2Mg in a material gas.
公开/授权文献
- US20170052115A1 CP2Mg CONCENTRATION MEASURING DEVICE 公开/授权日：2017-02-23
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