Invention Grant
- Patent Title: Covering material stripping method and stripping device using ion irradiation
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Application No.: US15324553Application Date: 2016-03-29
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Publication No.: US09824858B2Publication Date: 2017-11-21
- Inventor: Kensuke Uemura , G. Alexey Remnev
- Applicant: SHINMAYWA INDUSTRIES, LTD.
- Applicant Address: JP Takarazuka
- Assignee: SHINMAYWA INDUSTRIES, LTD.
- Current Assignee: SHINMAYWA INDUSTRIES, LTD.
- Current Assignee Address: JP Takarazuka
- Agency: Oliff PLC
- Priority: JP2015-078851 20150408
- International Application: PCT/JP2016/060257 WO 20160329
- International Announcement: WO2016/163278 WO 20161013
- Main IPC: H01J37/305
- IPC: H01J37/305 ; H01J37/08

Abstract:
A de-coating method includes: exposing a coated body in which a coating made of an inorganic material is formed on a surface of the metal body to ion flows to peel off the coating from the metal body, wherein the coated body is placed at an ion flow-concentrated portion where two or more ion flows overlap each other, and is exposed to the ion flows without addition of a positive or negative bias to the coated body. As gases for use in generating ions from plasma, oxygen and CF4 that promote de-coating through a chemical reaction are preferably used in addition to Ar that performs de-coating under the physical action of ion collision and stabilizes plasma.
Public/Granted literature
- US20170207065A1 COVERING MATERIAL STRIPPING METHOD AND STRIPPING DEVICE USING ION IRRADIATION Public/Granted day:2017-07-20
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