Semiconductor device and manufacturing method thereof
Abstract:
An improvement is achieved in the performance of a semiconductor device. A semiconductor device includes an n−-type semiconductor region formed in a p-type well, an n-type semiconductor region formed closer to a main surface of a semiconductor substrate than the n−-type semiconductor region, and a p−-type semiconductor region formed between the n−-type semiconductor region and the n-type semiconductor region. A net impurity concentration in the n−-type semiconductor region is lower than a net impurity concentration in the n-type semiconductor region. A net impurity concentration in the p−-type semiconductor region is lower than a net impurity concentration in the p-type well.
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