Invention Grant
- Patent Title: Electron microscope having a carrier
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Application No.: US14964586Application Date: 2015-12-10
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Publication No.: US09842722B2Publication Date: 2017-12-12
- Inventor: Hsin-Hung Lee , Cheng-Yu Lee , Chun-Lin Chiang , Kun-Chih Tsai , Win-Ti Lin
- Applicant: Industrial Technology Research Institute
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Priority: TW103143021A 20141210
- Main IPC: H01J37/18
- IPC: H01J37/18 ; H01J37/20 ; H01J37/28 ; G01N35/10

Abstract:
An electronic microscope includes a carrier, a first driving unit, a flow-buffer unit and an electron source. The carrier carries a sample. The first driving unit drives a first fluid to flow along a first flow path, wherein the first flow path passes through the sample. The flow-buffer unit is disposed on the first flow path to perform buffering on the first fluid, wherein the first fluid flows through the flow-buffer unit and the carrier in sequence. The electron source provides an electron beam to the sample.
Public/Granted literature
- US20160172152A1 ELECTRON MICROSCOPE HAVING A CARRIER Public/Granted day:2016-06-16
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