Invention Grant
- Patent Title: Ablation for feature recovery
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Application No.: US14835326Application Date: 2015-08-25
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Publication No.: US09842740B2Publication Date: 2017-12-12
- Inventor: Steven A. Mastain , Terry A. Jacobson
- Applicant: Seagate Technology LLC
- Applicant Address: US CA Cupertino
- Assignee: SEAGATE TECHNOLOGY LLC
- Current Assignee: SEAGATE TECHNOLOGY LLC
- Current Assignee Address: US CA Cupertino
- Agency: Holzer Patel Drennan
- Main IPC: B23K26/362
- IPC: B23K26/362 ; B23K26/00 ; B23K26/06 ; B23K26/03 ; H01L21/268 ; H01L21/302 ; H01L21/20 ; B23K26/0622 ; H01L23/544 ; B23K26/361 ; H01L21/66 ; B23K103/00

Abstract:
When opaque films are deposited on semi-conductor wafers, underlying features may be concealed. In accordance with one implementation, such concealed features may be re-exposed via an ablation recovery process. One ablation recovery process entails aligning an energy source with a target position on a first surface of a semiconductor wafer based on position information retrieved from a second opposite surface of the semiconductor wafer, and firing a beam of the energy source to ablate opaque material at the target position and to expose a recovery feature underlying the opaque material.
Public/Granted literature
- US20160059355A1 ABLATION FOR FEATURE RECOVERY Public/Granted day:2016-03-03
Information query
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