发明授权
- 专利标题: Optical component
-
申请号: US15050664申请日: 2016-02-23
-
公开(公告)号: US09851555B2公开(公告)日: 2017-12-26
- 发明人: Markus Holz , Benjamin Sigel , Jan Horn , Benedikt Knauf , Fabian Haacker
- 申请人: Carl Zeiss SMT GmbH
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT GmbH
- 当前专利权人: Carl Zeiss SMT GmbH
- 当前专利权人地址: DE Oberkochen
- 代理机构: Fish & Richardson P.C.
- 优先权: DE102013217146 20130828
- 主分类号: G03B27/54
- IPC分类号: G03B27/54 ; G02B26/08 ; B81B7/00 ; G03F7/20
摘要:
An optical component includes at least one micro-opto-electro-mechanical system (MOEMS) with a front side and a rear side. The optical component also includes at least one printed circuit board arranged on the rear side of the at least one MOEMS. The at least one printed circuit board has lateral contacts. The at least one printed circuit board may be equipped with electronic parts and cooling elements. The at least one MOEMS projects laterally beyond the at least one printed circuit board.
公开/授权文献
- US20160170201A1 OPTICAL COMPONENT 公开/授权日:2016-06-16
信息查询