- Patent Title: Apparatus and method for self-regulating fluid chemical delivery
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Application No.: US14476215Application Date: 2014-09-03
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Publication No.: US09857027B2Publication Date: 2018-01-02
- Inventor: Martin Jeff Salinas , Youqun Dong , David Thompson , Mei Chang
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: C23C16/44
- IPC: C23C16/44 ; G05D9/12 ; F24F6/02 ; F17C6/00 ; C23C16/448 ; G05D9/02

Abstract:
Methods and apparatus for chemical delivery are provided herein. In some embodiments, a first reservoir holds a first volume of fluid, receives a carrier gas, and outputs the carrier gas together with vapor derived from the first volume of fluid. A second reservoir holds a second volume of fluid and is capable of delivering a part of the second volume of fluid to the first reservoir. A self-regulating tube extends from the first reservoir to a region above the second volume of fluid in the second reservoir.
Public/Granted literature
- US20160004259A1 APPARATUS AND METHOD FOR SELF-REGULATING FLUID CHEMICAL DELIVERY Public/Granted day:2016-01-07
Information query
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