- 专利标题: Method for manufacturing polishing pad and polishing pad
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申请号: US12887363申请日: 2010-09-21
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公开(公告)号: US09862071B2公开(公告)日: 2018-01-09
- 发明人: Chung-Chih Feng , I-Peng Yao , Yung-Chang Hung , Lyang-Gung Wang
- 申请人: Chung-Chih Feng , I-Peng Yao , Yung-Chang Hung , Lyang-Gung Wang
- 申请人地址: TW Kaohsiung
- 专利权人: SAN FANG CHEMICAL INDUSTRY CO., LTD.
- 当前专利权人: SAN FANG CHEMICAL INDUSTRY CO., LTD.
- 当前专利权人地址: TW Kaohsiung
- 代理机构: WPAT, P.C., Intellectual Property Attorneys
- 代理商 Anthony King
- 优先权: TW98131972A 20090922
- 主分类号: C09K3/14
- IPC分类号: C09K3/14 ; B24B37/24
摘要:
The present invention relates to a method for manufacturing a polishing pad. The method of the invention includes the steps of forming a polishing layer from a polyurethane solution has a solid content more than about 90 wt % and drying the polyurethane solution at a temperature from about 130° C. to about 170° C. The invention also provides a polishing pad manufactured by the method mentioned above. The defect of scraping the surface of the substrate to be polished due to polishing particles remaining is avoided when applying the polishing pad according to the invention, and the flatness of the substrate to be polished is raised and the defective rate is eliminated also.
公开/授权文献
- US20110070814A1 Method for Manufacturing Polishing Pad and Polishing Pad 公开/授权日:2011-03-24
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