- 专利标题: Method for manufacturing liquid ejection head
-
申请号: US15137151申请日: 2016-04-25
-
公开(公告)号: US09862190B2公开(公告)日: 2018-01-09
- 发明人: Kyosuke Nagaoka
- 申请人: CANON KABUSHIKI KAISHA
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 代理机构: Fitzpatrick, Cella, Harper & Scinto
- 优先权: JP2015-101851 20150519
- 主分类号: H01L21/02
- IPC分类号: H01L21/02 ; B41J2/16 ; B08B3/08 ; C11D7/10 ; C11D7/50 ; C11D7/08
摘要:
A method for manufacturing a liquid ejection head including a substrate having a terminal for electrical connection to an external device, an inorganic material layer on the substrate, and a flow path member disposed on the inorganic material layer and containing an organic material, and the manufacturing method includes a cleaning step of removing a silane coupling agent attached to the terminal by using a solution containing hydrogen fluoride, ammonium fluoride, and a water-soluble organic solvent.
公开/授权文献
- US20160339704A1 METHOD FOR MANUFACTURING LIQUID EJECTION HEAD 公开/授权日:2016-11-24
信息查询
IPC分类: