- 专利标题: TFT device with silicon nitride film and manufacturing method thereof
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申请号: US15310098申请日: 2016-08-03
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公开(公告)号: US09864247B1公开(公告)日: 2018-01-09
- 发明人: Dongzi Gao
- 申请人: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- 申请人地址: CN Shenzhen
- 专利权人: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- 当前专利权人: Shenzhen China Star Optoelectronics Technology Co., Ltd.
- 当前专利权人地址: CN Shenzhen
- 优先权: CN201610539705 20160708
- 国际申请: PCT/CN2016/093066 WO 20160803
- 主分类号: G02F1/1362
- IPC分类号: G02F1/1362 ; G02F1/1368
摘要:
A TFT device of a liquid crystal display and a manufacturing method therefor are provided. The TFT device has: a substrate; a first metal layer formed on the substrate on which a first silicon nitride protective film is deposited; a second metal layer deposited on the first silicon nitride protective film on which a second silicon nitride protective film is deposited; and a conductive film deposited on the second metal layer where the second silicon nitride protective film is etched, and connected with the first metal layer through a contact hole which passes through the first and second silicon nitride protective films, so that the first and second metal layers are connected. Thus, the connecting distance of the conductive film between the different metal layers and the contact resistance between metals are decreased, so as to enhance the product yield rate and the competitive capability of the product.
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