- 专利标题: Substrate plating jig
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申请号: US14441648申请日: 2012-11-14
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公开(公告)号: US09865493B2公开(公告)日: 2018-01-09
- 发明人: Junichiro Yoshioka , Takashi Murayama
- 申请人: JCU CORPORATION
- 申请人地址: JP Taito-ku
- 专利权人: JCU CORPORATION
- 当前专利权人: JCU CORPORATION
- 当前专利权人地址: JP Taito-ku
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 国际申请: PCT/JP2012/079519 WO 20121114
- 国际公布: WO2014/076781 WO 20140522
- 主分类号: H01L21/687
- IPC分类号: H01L21/687 ; C25D17/06 ; C25D17/00
摘要:
A plating jig that can form a metal plating film simultaneously on both surfaces of a semiconductor wafer by one plating process. The plating jig includes a base section and a cover section that can hold a substrate to be plated, and a center section that holds the substrate between the base section and cover section; the base section, the cover section and the center section each having an annular portion having an opening at a center thereof; seal packings each having a conductive ring disposed thereon being attached to each of facing surfaces of the annular portions of the base section and the cover section; the substrate to be plated being disposed inside the opening of the center section; and the substrate to be plated being held from front and back surfaces thereof with the seal packings attached to the cover section and the center section.
公开/授权文献
- US20150294894A1 SUBSTRATE PLATING JIG 公开/授权日:2015-10-15
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