Invention Grant
- Patent Title: Integrated fan-out package and method of fabricating the same
-
Application No.: US15270008Application Date: 2016-09-20
-
Publication No.: US09870997B2Publication Date: 2018-01-16
- Inventor: Chih-Hao Chang , Hsin-Hung Liao , Hao-Yi Tsai , Chien-Ling Hwang , Wei-Sen Chang , Tsung-Hsien Chiang , Tin-Hao Kuo
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L23/538 ; H01L21/56 ; H01L21/683 ; H01L21/768 ; H01L23/00 ; H01L23/31

Abstract:
A method for fabricating an integrated fan-out package is provided. The method includes the following steps. A plurality of conductive posts are placed in apertures of a substrate. A carrier having an adhesive thereon is provided. The conductive posts are transferred to the carrier in a standing orientation by adhering the conductive posts in the apertures to the adhesive. An integrated circuit component is mounted onto the adhesive having the conductive posts adhered thereon. An insulating encapsulation is formed to encapsulate the integrated circuit component and the conductive posts. A redistribution circuit structure is formed on the insulating encapsulation, the integrated circuit component, and the conductive posts, wherein the redistribution circuit structure is electrically connected to the integrated circuit component and the conductive posts. The carrier is removed. At least parts of the adhesive are removed (e.g. patterned or entirely removed) to expose surfaces of the conductive posts. A plurality of conductive terminals are formed on the surfaces of the conductive posts exposed by the openings.
Public/Granted literature
- US20170345764A1 INTEGRATED FAN-OUT PACKAGE AND METHOD OF FABRICATING THE SAME Public/Granted day:2017-11-30
Information query
IPC分类: