Invention Grant
- Patent Title: Physical quantity detecting device, electronic apparatus, and moving object
-
Application No.: US14665293Application Date: 2015-03-23
-
Publication No.: US09874484B2Publication Date: 2018-01-23
- Inventor: Ryuta Nishizawa , Keiji Nakagawa , Keiichi Yamaguchi , Atsushi Matsuo , Fumio Ichikawa
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2014-060375 20140324
- Main IPC: H01L41/107
- IPC: H01L41/107 ; G01L1/16 ; G01L1/10 ; H01L41/09

Abstract:
A physical quantity detecting device includes a vibrating element and a charge amplifier. The vibrating element includes a first detection electrode, a second detection electrode, a third detection electrode, and a fourth detection electrode. The first and fourth detection electrodes have the same electrical polarity, the second and third detection electrodes have the same electrical polarity, and the first and second detection electrodes have opposite electrical polarities. The first and fourth detection electrodes are connected to the charge amplifier, and the second and third detection electrodes are connected to the charge amplifier.
Public/Granted literature
- US20150268107A1 PHYSICAL QUANTITY DETECTING DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT Public/Granted day:2015-09-24
Information query
IPC分类: