Invention Grant
- Patent Title: Imaging device comprising multilayer wiring structure and capacitance element capable of having relatively larger capacitance value
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Application No.: US15073611Application Date: 2016-03-17
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Publication No.: US09876046B2Publication Date: 2018-01-23
- Inventor: Yuuko Tomekawa , Tokuhiko Tamaki
- Applicant: Panasonic Intellectual Property Management Co., Ltd.
- Applicant Address: JP Osaka
- Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2015-075729 20150402
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H04N5/363 ; H04N5/232 ; H01L27/30

Abstract:
An imaging device includes: a semiconductor substrate; a photoelectric conversion element including a first electrode, a second electrode, and a photoelectric conversion film, supported on the semiconductor substrate, and generating a signal by performing photoelectric conversion on incident light; a multilayer wiring structure including an upper wiring layer and a lower wiring layer provided between the semiconductor substrate and the second electrode; and a signal detection circuit provided in the semiconductor substrate and the multilayer wiring structure, including a signal detection transistor and a first capacitance element, and detecting the signal. The signal detection transistor includes a gate and a source region and a drain region, the first capacitance element includes a first lower electrode, a first upper electrode, and a dielectric film disposed therebetween, the upper wiring layer is disposed between the second electrode and the gate, and the upper wiring layer includes the first upper electrode.
Public/Granted literature
- US20160293654A1 IMAGING DEVICE COMPRISING MULTILAYER WIRING STRUCTURE Public/Granted day:2016-10-06
Information query
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