- Patent Title: Non-volatile memory device with floating gate having a tip corner
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Application No.: US14105341Application Date: 2013-12-13
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Publication No.: US09876086B2Publication Date: 2018-01-23
- Inventor: Hsing-Chih Lin
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/66 ; H01L29/788 ; H01L27/11521

Abstract:
Embodiments of mechanisms for forming a memory device structure are provided. The memory device includes a first gate stack structure. The first gate stack structure includes a first dielectric layer over a semiconductor substrate. The first gate stack structure also includes a first floating gate over the first dielectric layer, and the first floating gate has a tip corner. The first gate stack structure further includes a second dielectric layer conformally covering an upper surface and sidewalls of the first floating gate. The second dielectric layer has a substantially uniform thickness. In addition, the first gate stack structure includes a first control gate over the second dielectric layer and partially over the first floating gate.
Public/Granted literature
- US20150171176A1 MECHANISMS FOR FABRICATING NON-VOLATILE MEMORY DEVICE WITH HIGH PRECISION OF FLOATING GATE FORMING Public/Granted day:2015-06-18
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