Invention Grant
- Patent Title: Heat-spreading blanking system for high throughput electron beam apparatus
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Application No.: US15255314Application Date: 2016-09-02
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Publication No.: US09881764B2Publication Date: 2018-01-30
- Inventor: Xinrong Jiang , Christopher Sears , Douglas Larson
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Hodgson Russ LLP
- Main IPC: H01J37/26
- IPC: H01J37/26 ; G21K5/04 ; H01J37/04 ; H01J37/21 ; H01J37/147

Abstract:
An electron beam apparatus addresses blanking issues resulting from sinking high-power heat onto an aperture diaphragm by evenly spreading heat on the aperture diaphragm. The apparatus can include an aperture diaphragm and a deflector that deflects the electron beam on the aperture diaphragm. The electron beam is directed at the aperture diaphragm in a pattern around the aperture. The pattern may be a circle, square, or polygon. The pattern also may include a variable locus relative to the aperture.
Public/Granted literature
- US20170200581A1 HEAT-SPREADING BLANKING SYSTEM FOR HIGH THROUGHPUT ELECTRON BEAM APPARATUS Public/Granted day:2017-07-13
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