- Patent Title: Insulated gate bipolar transistor and manufacturing method therefor
-
Application No.: US14902284Application Date: 2014-08-25
-
Publication No.: US09881994B2Publication Date: 2018-01-30
- Inventor: Shengrong Zhong , Dongfei Zhou , Xiaoshe Deng , Genyi Wang
- Applicant: CSMC TECHNOLOGIES FAB1 CO., LTD.
- Applicant Address: CN Wuxi New District, Jiangsu
- Assignee: CSMC Technologies Fabl Co., Ltd.
- Current Assignee: CSMC Technologies Fabl Co., Ltd.
- Current Assignee Address: CN Wuxi New District, Jiangsu
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- Priority: CN201310379443 20130827
- International Application: PCT/CN2014/085082 WO 20140825
- International Announcement: WO2015/027878 WO 20150305
- Main IPC: H01L21/332
- IPC: H01L21/332 ; H01L29/06 ; H01L29/66 ; H01L29/739 ; H01L29/10 ; H01L21/761 ; H01L29/04 ; H01L29/16 ; H01L29/161 ; H01L29/20

Abstract:
An insulated gate bipolar transistor (100) is provided. A substrate (10) of the insulated gate bipolar transistor (100) is of an N type. A P-type region (16) is disposed on a back of the N-type substrate. A back metal structure (18) is disposed on a back of the P-type region (16). A terminal protection ring is disposed in a terminal structure. A polysilicon gate (31) is disposed on a front surface of the substrate (10) in an active region. Sidewalls (72) are disposed at two sides of the polysilicon gate (31) on the substrate (10). An interlayer medium (81) covered with the polysilicon gate (31) and the sidewalls (72) is disposed on the substrate (10). The interlayer medium (81) is covered with a metal lead wire layer (91). An N-type carrier enhancement region (41) is disposed in the substrate (10) in the active region. A P-type body region (51) is disposed in the carrier enhancement region (41). An N-type heavily doped region (61) is disposed in the P-type body region (51). A P-type heavily doped region (71) is disposed in the N-type heavily doped region (61). An inward recessed shallow pit (62) with a depth of 0.15 to 0.3 micrometers is formed on a surface of the P-type heavily doped region (71). By disposing the carrier enhancement region (41), the carrier concentration of a channel can be increased and a forward voltage drop can be reduced; in addition, the shallow pit (62) can make a device obtain good impurity distribution and a large metal contact area, thereby improving the performance of the device.
Public/Granted literature
- US20160307995A1 INSULATED GATE BIPOLAR TRANSISTOR AND MANUFACTURING METHOD THEREFOR Public/Granted day:2016-10-20
Information query
IPC分类: