Invention Grant
- Patent Title: Evaporation equipment and evaporating method
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Application No.: US14443938Application Date: 2014-10-27
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Publication No.: US09882132B2Publication Date: 2018-01-30
- Inventor: Haidong Wu , Qun Ma , Taegyu Kim
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.
- Applicant Address: CN Beijing CN Ordos
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.
- Current Assignee Address: CN Beijing CN Ordos
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: CN201410433251 20140828
- International Application: PCT/CN2014/089539 WO 20141027
- International Announcement: WO2016/029539 WO 20160303
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H01L21/67 ; C23C14/24 ; H01L21/66 ; H01L51/56 ; C23C14/54

Abstract:
The disclosed in the present disclosure is an evaporation equipment and an evaporating method. The evaporation equipment may include: a support, which is arranged for loading a substrate to be evaporated; and a zone temperature controlling device, which includes at least two temperature controlling parts and at least one temperature controlling device. A loading surface of the support may include a plurality of zones, and each of the plurality of zones may correspond to an evaporation region of the substrate to be evaporated. And each of the plurality of zones may be arranged with a temperature controlling part, and the temperature controlling device may be configured to control temperatures provided by the temperature controlling parts, so as to control corresponding deposition rates of film coating on the evaporation regions.
Public/Granted literature
- US20160301007A1 EVAPORATION EQUIPMENT AND EVAPORATING METHOD Public/Granted day:2016-10-13
Information query
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