Invention Grant
- Patent Title: Sample carrying device and vacuum apparatus
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Application No.: US15005109Application Date: 2016-01-25
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Publication No.: US09885639B2Publication Date: 2018-02-06
- Inventor: Masakatsu Hasuda , Toshiyuki Iwahori
- Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
- Applicant Address: JP
- Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
- Current Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
- Current Assignee Address: JP
- Agency: Klintworth & Rozenblat IP LLP
- Agent Bruce L. Adams
- Priority: JP2015-017440 20150130
- Main IPC: H01J37/18
- IPC: H01J37/18 ; G01N1/14 ; H01J37/20

Abstract:
A sample carrying device includes a sample carrying rod that carries a sample in the left-right direction in a sample compartment and a preparatory sample compartment, a support body that supports the sample carrying rod, a case that supports the support body such that the support body can rotate around a rotational axis perpendicular to the left-right direction, and an Q-ring disposed between the support body and the case for sealing the sample compartment and the preparatory sample compartment. The sample carrying rod can be switched between a use state where it can carry a sample and a stowed state where it has been moved in the up-down direction from the use state by rotation of the support body. The sample carrying device can easily stow a sample carrying rod in a small space.
Public/Granted literature
- US20160223434A1 SAMPLE CARRYING DEVICE AND VACUUM APPARATUS Public/Granted day:2016-08-04
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