公开(公告)号：US11906899B2

公开(公告)日：2024-02-20

申请号：US16785368

申请日：2020-02-07

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Yoshitomo Nakagawa ,  Mitsuto Aso ,  Katsumi Suzuki ,  Mamoru Okabe ,  Masakatsu Hasuda

IPC: G03F1/74 ,  H01J37/317

CPC classification number: G03F1/74 ,  H01J37/3178

Abstract: Disclosed is a mask defect repair apparatus that is capable of performing defect repair with high accuracy without exposure of a mask to air while being moved between the mask defect repair apparatus and an inspection device. The mask defect repair apparatus emits charged particle beams with an amount of irradiation therewith which is corrected by a correction unit while supplying gas to a defect of the mask, thereby forming a deposition film.

公开(公告)号：US10468228B2

公开(公告)日：2019-11-05

申请号：US15936174

申请日：2018-03-26

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Masakatsu Hasuda

IPC: H01J37/20

Abstract: A charged particle beam apparatus includes a charged particle beam column for irradiating a sample with a charged particle beam, and a sample stage unit for moving the sample relative to the charged particle beam column. The sample stage unit includes a rotary stage section having a base portion and a rotary mover rotatable about a rotary axis relative to the base portion. A rotary connector is disposed coaxially with and rotatable about the rotary axis and fitted between the base portion and the rotary mover for electrically connecting wirings between relatively rotating elements. A connection electrode is disposed on the sample stage unit in electrical connection with the rotary connector. In the charged particle beam apparatus, the sample is able to be rapidly placed and replaced.

公开(公告)号：US08674324B2

公开(公告)日：2014-03-18

申请号：US13839862

申请日：2013-03-15

Applicant: Hitachi High-Tech Science Corporation

Inventor： Masakatsu Hasuda

IPC: H01J37/20

CPC classification number: H01J37/20 ,  H01J2237/204 ,  H01J2237/31713

Abstract: A charged particle beam apparatus includes: a sample chamber; a sample stage; an electron beam irradiation system for irradiating the sample with an electron beam; a focused ion beam irradiation system for irradiating the sample with a focused ion beam; a sample stage drive unit having a rotational axis orthogonal to at least one of an irradiation axis of the electron beam irradiation system and an irradiation axis of the focused ion beam irradiation system; and a sample transporting mechanism for transporting the sample to the sample stage. The sample transporting mechanism includes a transportation path provided in the sample stage drive unit in a direction parallel to the rotational axis of the sample stage drive unit, and is configured to transport the sample to the sample stage through the transportation path.

Abstract translation: 带电粒子束装置包括：样品室; 样品台 用于用电子束照射样品的电子束照射系统; 聚焦离子束照射系统，用于用聚焦离子束照射样品; 样品台驱动单元，其具有与电子束照射系统的照射轴和聚焦离子束照射系统的照射轴中的至少一个正交的旋转轴; 以及用于将样品输送到样品台的样品传送机构。 样品输送机构包括在与样品台驱动单元的旋转轴平行的方向上设置在样品台驱动单元中的输送路径，并且被配置为通过输送路径将样品输送到样品台。

公开(公告)号：US09885639B2

公开(公告)日：2018-02-06

申请号：US15005109

申请日：2016-01-25

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Masakatsu Hasuda ,  Toshiyuki Iwahori

IPC: H01J37/18 ,  G01N1/14 ,  H01J37/20

CPC classification number: G01N1/14 ,  H01J37/20 ,  H01J2237/202 ,  H01J2237/31745

Abstract: A sample carrying device includes a sample carrying rod that carries a sample in the left-right direction in a sample compartment and a preparatory sample compartment, a support body that supports the sample carrying rod, a case that supports the support body such that the support body can rotate around a rotational axis perpendicular to the left-right direction, and an Q-ring disposed between the support body and the case for sealing the sample compartment and the preparatory sample compartment. The sample carrying rod can be switched between a use state where it can carry a sample and a stowed state where it has been moved in the up-down direction from the use state by rotation of the support body. The sample carrying device can easily stow a sample carrying rod in a small space.

公开(公告)号：US20170062174A1

公开(公告)日：2017-03-02

申请号：US15252403

申请日：2016-08-31

Applicant: Hitachi High-Tech Science Corporation

Inventor： Toshiyuki Iwahori ,  Masakatsu Hasuda

IPC: H01J37/18 ,  H01J37/285 ,  H01J37/20

CPC classification number: H01J37/185 ,  H01J37/20 ,  H01J37/285 ,  H01J2237/2002 ,  H01J2237/2004 ,  H01J2237/2006 ,  H01J2237/31749

Abstract: Provided is a transport device in which a reduction in the size and a reduction in the cost of the entire device are possible. A transport unit which is interposed between a sub-chamber and a first treatment chamber is provided with: a transport bar which transports a sample along a right-left direction in a preliminary sample chamber; a support which supports the transport bar; a case which supports the support so as to be rotatable around a rotation axis intersecting the right-left direction; and a second O-ring which seals an inside of the case. The preliminary sample chamber and a first treatment space can communicate with each other through the inside of the case. The transport bar is made so as to be able to transition between a first state where the transport bar can transport the sample between the preliminary sample chamber and the inside of the case, and a second state where the transport bar can transport the sample between the first treatment space and the inside of the case, by rotation of the support with respect to the case.

Abstract translation: 提供了可以减小整体装置的尺寸和降低成本的运送装置。 插入在副室和第一处理室之间的输送单元设置有：在预备样品室中沿左右方向输送样品的输送条; 支持运输栏; 支撑支撑件以能够围绕与左右方向相交的旋转轴线旋转的壳体; 以及密封壳体内部的第二O形环。 预备样品室和第一处理空间可以通过壳体内部彼此连通。 输送条被制成能够在输送条可以在预备样品室和壳体内部之间输送样品的第一状态和第二状态之间转移，其中输送条可以将样品在 第一处理空间和壳体的内部，通过支撑件相对于壳体的旋转。