Invention Grant
- Patent Title: Module testing utilizing wafer probe test equipment
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Application No.: US14734341Application Date: 2015-06-09
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Publication No.: US09885748B2Publication Date: 2018-02-06
- Inventor: Martin Eckert , Eckhard Kunigkeit , Quintino L. Trianni , Christian Zoellin
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Francis Lammes; Stephen J. Walder, Jr.; Damion Josephs
- Main IPC: G01R31/28
- IPC: G01R31/28 ; G01R1/04

Abstract:
A module plate is provided for use with a wafer handler and testing mechanism. The module plate has a diameter equivalent to an integrated circuit wafer and a height equivalent to or less than a height of a module lid associated with each module in a plurality of modules associated with the module plate. The module plate has a plurality of cutouts in the module plate that have a width equivalent to a width of the module lid and at least a length equivalent to a length of the module lid. The height of the module plate is such that, when a test head contacts a module base of each module in a plurality of modules, the module lid contacts a chuck on which the module plate resides during testing of the module thereby providing resistance in order to accurately test the module.
Public/Granted literature
- US20160365268A1 Module Testing Utilizing Wafer Probe Test Equipment Public/Granted day:2016-12-15
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